Oxford Instruments Nanotechnology Tools Ltd

Apparatus and instruments for thin film processing, namely, thin film processing machines; apparatus and instruments for thin film processing, namely, power operated atomic layer deposition tools for plasma atomic layer deposition, thermal atomic layer deposition, and atomic layer epitaxy; power operated etch tools for atomic layer etching and power operated cluster tools for etching; apparatus and instruments for thin film processing, namely, power operated atomic layer deposition tools for plasma atomic layer deposition, thermal atomic layer deposition, and atomic layer epitaxy; power operated etch tools for atomic layer etching and power operated cluster tools for etching with automated handling

Scientific and laboratory apparatus and instruments in the field of plasma technology and semiconductor processing, namely, plasma sources, sources for generating plasma, namely, plasma etching apparatus comprising scientific instruments to ionise gas for the etching of silicon and semiconductor, conductor and insulating materials and semiconductor wafers and thin solid films on semiconductor wafers, scientific instruments used to etch silicon and semiconductor, conductor and insulating materials and semiconductor wafers and thin solid films on semiconductor wafers, scientific instruments for the creation of plasma, scientific instruments used to ionise gas in a reaction chamber; apparatus and instruments for plasma generation, sources for generating ionized gas plasma, comprising scientific instruments for the creation of plasma, scientific instruments used to ionise gas in a reaction chamber, creation of plasma via induction coupling all being laboratory apparatus and instruments; plasma research apparatus and instruments, namely, plasma etching apparatus comprising scientific instruments to ionise gas for the etching of silicon and semiconductor, conductor and insulating materials and semiconductor wafers and thin solid films on semiconductor wafers, scientific instruments used to etch silicon and semiconductor, conductor and insulating materials and semiconductor wafers and thin solid films on semiconductor wafers, all being laboratory apparatus and instruments; plasma cluster tools, namely, scientific apparatus comprising multiple plasma etching chambers sharing a common vacuum wafer loading module, all being laboratory apparatus and instruments; computer hardware and software for use in operating the aforesaid goods

Class 009: Apparatus and instruments for microanalysis for non-medical purposes; namely, an x-ray detector, a pulse processor to characterize the x-ray energy, a MICS unit, namely a microscope image control system, for providing external scan control for the scanning electron microscope, and software for controlling the hardware; electron microscopes and microanalysis apparatus and instruments for non-medical purposes, namely, an x-ray detector, a pulse processor to characterize the x-ray energy, a MICS unit, namely a microscope image control system for providing external scan control for the scanning electron microscope, and software for controlling the hardware; x-ray microanalysis systems for non-medical purposes comprised of x-ray generating tubes, x-ray detectors, x-ray focusing devices, namely, x-ray mirrors, x-ray capillaries and x-ray optics; parts and fittings and controlling software for all of the aforesaid goods

Class 009: X-RAY MICROANALYSIS SYSTEMS, CONSISTING OF X-RAY DETECTORS, COMPUTER HARDWARE AND COMPUTER SOFTWARE THEREFORE, FOR DETECTING, MEASURING AND EVALUATING X-RAYS, ELECTRON IMAGES AND SIGNALS EMITTED AND PROJECTED BY SAMPLES WHEN STRUCK BY THE BEAM OF AN ELECTRON MICROSCOPE, NOT FOR USE IN THE MEDICAL FIELD; PARTICLE ANALYZERS; SIGNAL PROCESSORS; RADIATION ANALYZERS; LIGHT ELEMENT DETECTORS; AND X-RAY ANALYZERS

Class 009: Scientific and electrical apparatus and instruments, namely, flexible ion beam processing systems for ion beam etching and ion beam deposition; computer hardware and software for use therewith; and parts and fitting for all the above-said goods

Flexible ion beam processing systems for ion beam etching and ion beam deposition; ion beam system controllers; ion beam neutralization systems consisting of filamentless beam neutralizers; faraday cup beam current monitoring systems consisting of metal cups and electrometers; computer hardware and software for use therewith; and parts and fitting for all the above-said goods

X-RAY MICROANALYSIS SYSTEMS, CONSISTING OF INSTRUMENTS FOR DETECTING, MEASURING AND EVALUATING X-RAYS, ELECTRON IMAGES AND SIGNALS EMITTED AND PROJECTED BY SAMPLES WHEN STRUCK BY THE BEAM OF AN ELECTRON MICROSCOPE; PARTICLE ANALYZERS; SIGNAL PROCESSORS; RADIATION ANALYZERS; LIGHT ELEMENT DETECTORS; X-RAY ANALYZERS

scientific instruments, namely, X-ray apparatus for non-medical microanalysis; instruments for analysis of chemical compositions; instruments for color analysis and color coding of samples; and computer software for use in operating X-ray apparatus for non-medical microanalysis

Class 009: PLASMA ETCHING AND DEPOSITION SYSTEMS, COMPRISING COMPUTERS, MICROPROCESSORS, AUTOMATIC CONTROLS, HIGH VACUUM CHAMBERS AND HIGH VACUUM PUMPING UNITS, ELECTRODES AND HIGH FREQUENCY PLASMA GENERATORS AND ASSOCIATED ANALYZERS USED IN THE MANUFACTURE OF INTEGRATED CIRCUITS, ELECTRONIC AND OPTICAL EQUIPMENT

Apparatus and instruments for plasma deposition for manufacturing and processing semiconductors for plasma deposition and thermal growth for manufacturing and processing semiconductors; apparatus and instruments for manufacturing, processing and plasma treatment of semiconductor wafers, plastics or other materials; plasma cluster tools, all being laboratory apparatus and instruments; laboratory apparatus and instruments for plasma research; computer hardware and downloadable software for for the purpose of the control and operation of vapor deposition machines, plasma deposition and thermal growth machines, apparatus and instruments for thin film processing namely, atomic layer deposition tools, chemical vapour deposition tools, etch tools and cluster tools and flexible plasma processing apparatus for plasma etching and plasma deposition; replacement parts for the aforesaid goods; Vapor deposition machines for use in manufacturing semiconductors; plasma deposition and thermal growth machines for use in manufacturing semiconductors; apparatus and instruments for thin film processing namely, atomic layer deposition tools, chemical vapour deposition tools, etch tools and cluster tools; flexible plasma processing apparatus for plasma etching and plasma deposition

Plasma etching machines; semiconductor processing machines for etching substrates; semiconductor processing machines for etching semiconductor wafers; robotic wafer handlers; robotic handling apparatus | Computer hardware and downloadable software for use in the field of wafers and semiconductor processing for the purpose of the control and operation of plasma etching machines, semiconductor processing machines for etching substrates, semiconductor processing machines for etching semiconductor wafers, robotic wafer handlers and robotic handling apparatus; laboratory apparatus and instruments for handling and plasma treatment of semiconductor wafers, plastics or other materials; plasma cluster tools, all being laboratory apparatus and instruments; laboratory plasma apparatus and instruments for use in research; replacement parts for the aforesaid goods

Plasma etching machine tools for measurement; plasma etching machines; semiconductor processing machines for etching substrates; semiconductor processing machines for etching semiconductor wafers; robotic wafer handlers; robotic handling apparatus | Measurement apparatus for the semiconductor industry; computer hardware and downloadable software in the field of wafers and semiconductor processing for the purpose of the control and operation of plasma etching machines, semiconductor processing machines for etching substrates, semiconductor processing machines for etching semiconductor wafers, robotic wafer handlers and robotic handling apparatus; laboratory plasma apparatus and instruments for use in research; replacement parts for the aforesaid goods

Ultra-low temperature refrigerators; dilution refrigerators; helium refrigerators; electronic controllers for refrigerators; sample and measurement probes for scientific purposes; all the aforesaid being laboratory apparatus; structural parts and fittings for all the aforesaid goods | Refrigerators; dilution refrigerators; helium refrigerators; cryogenic freezers; structural parts and fittings for all the aforesaid goods

Recorded and downloadable computer control software for controlling and use in thin film production, the processing and coating of substrate structures, and plasma and ion beam processing; recorded and downloadable computer control software programmes for controlling and use in thin film production, the processing and coating of substrate structures, and plasma and ion beam processing; recorded and downloadable computer control software applications for mobile phones, portable media players, handheld computers, laptops and tablets, namely, software for controlling and use in thin film production, the processing and coating of substrate structures, and plasma and ion beam processing; recorded industrial process control software; recorded and downloadable control software for monitoring, controlling and running scientific and technical apparatus; recorded and downloadable computer control software for controlling and use in thin film production, the processing and coating of substrate structures, and plasma and ion beam processing in the field of science and technology; recorded and downloadable computer control software for controlling, collecting, processing, analyzing and monitoring data and signals

Apparatus and instruments for thin film processing, namely, thin film processing machines; apparatus and instruments for thin film processing namely, power operated atomic layer deposition tools, power operated chemical vapour deposition tools, power operated etch tools and power operated cluster tools; apparatus and instruments for thin film processing namely, power operated atomic layer deposition tools, power operated etch tools and power operated cluster tools with automated handling; flexible ion beam processing systems for ion beam etching and ion beam deposition, namely, machines and machine tools for ion beam etching and deposition

Class 009: Apparatus and instruments for thin film processing, namely, atomic layer deposition tools for plasma atomic layer deposition, thermal atomic layer deposition, atomic layer epitaxy, etch tools for atomic layer etching and cluster tools for etching; apparatus and instruments for thin film processing, namely, atomic layer deposition tools for plasma atomic layer deposition, thermal atomic layer deposition, atomic layer epitaxy, etch tools for atomic layer etching and cluster tools for etching with automated handling

Scientific and measuring apparatus and instruments, namely cryostats, electronic signal control boxes, measurement probes, specimen holders and signal cables for use with cryogenic measurement systems; laboratory apparatus and instruments, namely cryostats, electronic signal control boxes, measurement probes, specimen holders and signal cables for use with cryogenic measurement systems; structural and replacement parts for the aforesaid goods

Electron backscatter diffraction cameras; electron backscatter diffraction cameras used in relation to electron beam microscopes; electron backscatter diffraction cameras used in relation to ion beam microscopes; electron backscatter diffraction (EBSD) detectors for use in relation to electron microscopes; electron backscatter diffraction (EBSD) detectors for use in relation to ion beam microscopes

Silicon drift detectors for X-ray analysis, not for medical use; silicon drift detectors for energy-dispersive X-ray spectroscopy, not for medical use; silicon drift detectors for wavelength dispersive X-ray spectroscopy, not for medical use

computer software for use with electron and ion-beam microscopes that uses the EDS (Energy Dispersive Spectroscopy) microanalysis technique to calculate the various film thicknesses and compositions that are present in a sample; computer software for measuring samples inside microscopes, including electron and ion-beam microscopes; computer software for processing X-ray data acquired from multi-layered samples inside an electron or ion-beam microscope to calculate the various film thicknesses and compositions that are present

Apparatus and instruments in the field of plasma technology and semiconductor processing, plasma sources, sources for generating plasma, namely, plasma etching apparatus comprising scientific instruments to ionise gas for the etching of silicon and semiconductor, conductor and insulating materials and semiconductor wafers and thin solid films on semiconductor wafers, scientific instruments used to etch silicon and semiconductor, conductor and insulating materials and semiconductor wafers and thin solid films on semiconductor wafers, scientific instruments for the creation of plasma, scientific instruments used to ionise gas in a reaction chamber; apparatus and instruments for plasma generation, sources for generating ionized gas plasma, comprising scientific instruments for the creation of plasma, scientific instruments used to ionise gas in a reaction chamber, creation of plasma via induction coupling; plasma research apparatus and instruments, namely, plasma etching apparatus comprising scientific instruments to ionise gas for the etching of silicon and semiconductor, conductor and insulating materials and semiconductor wafers and thin solid films on semiconductor wafers, scientific instruments used to etch silicon and semiconductor, conductor and insulating materials and semiconductor wafers and thin solid films on semiconductor wafers; plasma cluster tools, namely, scientific apparatus comprising multiple plasma etching chambers sharing a common vacuum wafer loading module, all being laboratory apparatus and instruments; computer hardware and software for use in operating the aforesaid goods; structural parts and fittings for all the aforesaid goods

Class 009: Apparatus and instruments in the field of plasma technology and semiconductor processing, plasma sources, sources for generating plasma, namely, plasma etching apparatus comprising scientific instruments to ionise gas for the etching of silicon and semiconductor, conductor and insulating materials and semiconductor wafers and thin solid films on semiconductor wafers, scientific instruments used to etch silicon and semiconductor, conductor and insulating materials and semiconductor wafers and thin solid films on semiconductor wafers, scientific instruments for the creation of plasma, scientific instruments used to ionise gas in a reaction chamber; apparatus and instruments for plasma generation, sources for generating ionized gas plasma, comprising scientific instruments for the creation of plasma, scientific instruments used to ionise gas in a reaction chamber, creation of plasma via induction coupling; plasma research apparatus and instruments, namely, plasma etching apparatus comprising scientific instruments to ionise gas for the etching of silicon and semiconductor, conductor and insulating materials and semiconductor wafers and thin solid films on semiconductor wafers, scientific instruments used to etch silicon and semiconductor, conductor and insulating materials and semiconductor wafers and thin solid films on semiconductor wafers; plasma cluster tools, namely, scientific apparatus comprising multiple plasma etching chambers sharing a common vacuum wafer loading module, all being laboratory apparatus and instruments; computer hardware and software for use in operating the aforesaid goods; structural parts and fittings for all the aforesaid goods

Apparatus and instruments for materials characterization and sample manipulation inside electron and ion-beam microscopes, namely, microanalysis X-ray detectors, and data acquisition and analytical software for Energy Dispersive Spectroscopy (EDS) and Wavelength Dispersive Spectroscopy (WDS), and detectors and data acquisition and analytical software for Electron Backscatter Diffraction (EBSD) analysis

Laboratory apparatus and instruments for the exchange of substances and heat with regard to plasma technology and semiconductor processing; laboratory robots for handling semiconductor wafers; tool measuring instruments, namely, plasma cluster tools and plasma processing research apparatus; computer hardware and software for operating the foregoing

[ Magnets and superconducting magnets; cryogenic apparatus and instruments for laboratory use, namely, cryostats; ] apparatus and instruments for storing and handling cryogens, namely, open measuring buckets, float gauges, adaptors, laboratory storage tubes, glass transfer tubes for scientific purposes; flow regulators for scientific use; control valves for regulating the flow of gases and liquids, meters for measuring the flow of gases and liquids, controlled volume pumps, laboratory filters; computer parallel and serial ports, data and power access ports, electrical plugs and adaptor plugs; coaxial cables; electrically operated heaters and coolers for laboratory use; specimen holders, namely, beakers, flasks, and laboratory storage tubes; sensor mounting blocks; helium and nitrogen probes, namely, electric sensors for measuring oxygen levels; apparatus and instruments for thermometry, namely, temperature sensors, thermometers, and thermocouples; power supplies; [ sound level meters; ] safety equipment, namely, face protection masks, disposable plastic gloves for laboratory use, and protective clothing; nuclear magnetic resonance apparatus and instruments, namely, electronic cryogen level meters; electrical wires and electrical superconducting wires; replacement parts for the aforesaid goods

Cryogenic apparatus and instruments for laboratory use, namely, ultra-low temperature refrigerators, dilution refrigerators, controllers for controlling the operation of the ultra-low temperature refrigerators and dilution refrigerators, sample and measurement probes for holding samples and taking measurements for experiments, chambers and chamber inserts, and replacement parts and fittings for the listed goods

SCIENTIFIC APPARATUS AND INSTRUMENTS, NAMELY, SUPERCONDUCTING MAGNETS, CRYOSTATS, AND REPLACEMENT PARTS AND FITTINGS THEREFOR

DILUTION REFRIGERATOR UNITS OPERATING AT EXTREMELY LOW (MILLIKELVIN) TEMPERATURES FOR USE BY SCIENTIFIC RESEARCH INSTITUTIONS * FOR THE PURPOSE OF COOLING SAMPLES OF MATERIAL OF 10MM OR LESS IN DIAMETER TO TERMPERATURES NEAR ABSOLUTE ZERO *