AXCELIS TECHNOLOGIES, INC.

Class 009: electrical equipment, namely, surface treatment equipment for thin film covered wafers or substrates for semiconductors

Class 009: ION SOURCE FOR ION IMPLANTER

Class 009: electrical equipment, namely, thermal processors, photoresist processors, ashers, photostabilizers and ion implanters all for use in the manufacture of semiconductors; Class 037: maintenance and repair of semiconductor manufacturing equipment

Class 009: electrical equipment, namely, thermal processors, photoresist processors, ashers, photostablizers and ion implanters all for use in the manufacture of semiconductors; Class 037: maintenance and repair of semiconductor manufacturing equipment

semiconductor wafer furnaces