Centrotherm Elektrische Anlagen GmbH & Co. KG

Hardware and software used to operate systems and devices for thermal processing, namely, diffusion furnaces, continuous furnaces, burn in kilns, vacuum soldering furnaces, coating furnaces, annealing furnaces, enameling ovens, vacuum furnaces, plants for chemical vapor deposition; Mechanical devices in the nature of manipulators, for handling or transport of semiconductor wafers; Plants and equipment for thermal processing or manufacturing methods, namely, diffusion furnaces, continuous furnaces, burn in kilns, vacuum soldering furnaces, coating furnaces, annealing furnaces, enameling furnaces, vacuum furnaces, plants for chemical vapor deposition (CVD-plants); systems for processing of semiconductor wafers in vacuum, namely diffusion furnaces, plants for chemical vapor deposition; systems for handling and cleaning of gases and exhaust gases, namely, gas purification plants; "INTERNATIONAL"

plants and equipment for thermal processing or manufacturing methods, namely, diffusion furnaces, continuous furnaces, plants for chemical vapor deposition (CVD plants), burn-in kilns, and vacuum soldering furnaces; plants for treating and purifying gases and waste gases, namely, gas purification plants