Eagle Harbor Technologies, Inc.

Class 009: Radio-frequency (RF) power supplies and RF plasma generators for semiconductor manufacturing; electrical power control apparatus for conducting, regulating, and controlling RF power delivered to plasma sources; RF power systems for inductively coupled plasma (ICP) and capacitively coupled plasma (CCP) generation; equipment for supplying RF power for wafer biasing in semiconductor processing; electronic apparatus for monitoring, modulating, and controlling plasma processes in semiconductor fabrication chambers.

Class 009: Radio-frequency (RF) power supplies and RF plasma generators for semiconductor manufacturing; electrical power control apparatus for conducting, regulating, and controlling RF power delivered to plasma sources; RF power systems for inductively coupled plasma (ICP) and capacitively coupled plasma (CCP) generation; equipment for supplying RF power for wafer biasing in semiconductor processing; electronic apparatus for monitoring, modulating, and controlling plasma processes in semiconductor fabrication chambers.

Class 007: Plasma generators for semi-conductor processing; Class 009: Power supplies, high voltage power supplies, high voltage power supplies for medical device applications, pulsing power supplies, integrators, namely, nanosecond pulsers and pulsed power supplies, high voltage switches, plasma generators, namely, nanosecond pulsers and pulsed power supplies, microwave drivers, RF power generators