MATTSON TECHNOLOGY, INC.

Machines for manufacturing semiconductor substrates, namely, machines for heating or annealing semiconductor substrates via rapid thermal processing, machines for cleaning semiconductor substrates, and machines for depositing layers of material onto semiconductor substrates; Machines for manufacturing semiconductor substrates, namely, machines having microwave sources for heating or annealing semiconductor substrates; Machines for manufacturing semiconductor substrates, namely, machines for thermal processing including a microwave source

Semiconductor substrate processing equipment, namely, processing chambers for semiconductor substrates for carrying out materials removal processes and surface treatment processes

Machinery in the nature of equipment for the treatment and processing of semiconductor substrates and other semiconductor workpieces, semiconductor substrates, silicon wafers and semiconductor wafers

Machinery in the nature of equipment for the treatment and processing of semiconductor substrates and other semiconductor workpieces, semiconductor substrates, silicon wafers and semiconductor wafers

semiconductor processing equipment

servicing of equipment for the treatment and processing of substrates and other workpieces, semiconductor substrates, silicon wafers and wafers, including equipment for rapid thermal processing, dry strip, and etch applications

servicing of equipment for the treatment and processing of substrates and other workpieces, semiconductor substrates, silicon wafers and wafers, including equipment for rapid thermal processing, dry strip, and etch applications

Class 007: equipment for the treatment and processing of semiconductor substrates and other semiconductor workpieces, semiconductor substrates, silicon wafers and semiconductor wafers, including equipment for rapid thermal processing, dry strip, and etch applications; Class 037: servicing of equipment for the treatment and processing of substrates and other workpieces, semiconductor substrates, silicon wafers and wafers, including equipment for rapid thermal processing, dry strip, and etch applications

Semiconductor manufacturing equipment, namely, semiconductor wafer processing chambers

Semiconductor wafer processors

Semiconductor processing equipment, namely, processing chambers for semiconductor substrates for carrying out various processes including etch processes

Class 007: Processing equipment for semiconductor wafers

Semiconductor manufacturing equipment, namely, processing chambers for stripping photoresist materials

processing equipment for semiconductor wafers including semiconductor platforms and processing modules

SEMICONDUCTOR WAFER PROCESSING TOOL FOR DEPOSITING A THIN FILM ONTO A WAFER

Tool for depositing a thin film onto a substrate; "CVD"

Tool for depositing a thin film onto a substrate

ELECTRIC ULTRA-HIGH INTENSITY LAMPS AND PARTS THEREFOR