Machines and machine tools for atomic scale layer deposition; atomic scale layer deposition machines for manufacturing medical devices | Data processing equipment; computers and computer programmes for controlling and monitoring atomic scale layer deposition machines | Treatment and coating of materials by means of the atomic scale layer deposition method and consulting connected thereto
Treatment and coating of materials by atomic scale layer deposition method and consulting connected thereto; Data processing equipment; computers and computer programmes for controlling and monitoring atomic scale layer deposition apparatus; Machines and machine tools for atomic scale layer deposition; atomic scale layer deposition machines; "ALD"
Treatment and coating of materials in the nature of applying coatings by atomic scale layer deposition method, in particular, by chemical deposition and etching of components for integrated circuits and optics with chemicals and/or plasma, and consulting connected thereto; Data processing equipment; computers and computer programmes for atomic scale layer deposition apparatus; Machines and machine tools for atomic scale layer deposition, in particular chemical deposition machines for chemical processing, not for research use and chemical and plasma etching machines; machines, namely, atomic scale layer deposition apparatus, in particular chemical deposition machines for chemical processing, not for research use and chemical and plasma etching machines
Machines and machine tools for atomic scale layer deposition; atomic scale layer deposition apparatus, namely, industrial chemical [ and industrial photochemical ] reactors; reactor systems consisting of several industrial chemical [ and industrial photochemical ] reactors, precursor sources, inactive gas sources, plasma sources, source units, loading units, lift units, substrate holders, deposition cartridges, diffusion enhancers, gas treatment units, particle traps, water cooling units and chillers, all of which are sold as an integral part of the atomic scale layer deposition industrial chemical [ and industrial photochemical ] reactors; and reactor systems consisting of several industrial chemical [ and industrial photochemical ] reactors as described above | Data processing equipment; computers and computer programmes for controlling and monitoring atomic scale layer deposition apparatus, namely, reactors and reactor systems consisting of several reactors, for collecting data from aforementioned atomic scale layer deposition apparatus, user interface software for aforementioned atomic scale layer deposition apparatus, computer software enabling aforementioned atomic scale layer deposition apparatus to interface and communicate with devices used in connection with aforementioned atomic scale layer deposition apparatus, computer software for controlling and monitoring devices used in connection with aforementioned atomic scale layer deposition apparatus | Treatment and coating of materials by atomic scale layer deposition method and consulting connected thereto
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