Brooks Automation US, LLC

Industrial robots; Industrial robots for handling and transporting reticles, substrates, wafers, and panels for use in semiconductor manufacturing; Industrial robots for use in manufacturing semiconductor devices, integrated circuits, and electronic devices; Machines for handling and transporting reticles, substrates, wafers, and panels for use in semiconductor manufacturing; Machines for use in manufacturing semiconductor devices, integrated circuits, and electronic devices

Machines for cleaning wafer carriers; Machines for contamination control in semiconductor device manufacturing; Machines for semiconductor device manufacturing; Machines for inspecting reticle carriers; Machines for manufacturing semiconductors; Semiconductor manufacturing machines; Machines for cleaning reticle carriers; Machines for inspecting wafer carriers

Downloadable and recorded software for operating machines, electronic imaging platforms, and optical inspection apparatus for inspecting semiconductor wafer carriers, front opening unified pods (FOUPs), and front opening shipping boxes (FOSBs); Electronic imaging platforms for inspecting semiconductor wafer carriers, front opening unified pods (FOUPs), and front opening shipping boxes (FOSBs), with integrated recorded software for operating the electronic imaging platforms, sold as a unit; Optical inspection apparatus for inspecting semiconductor wafer carriers, front opening unified pods (FOUPs), and front opening shipping boxes (FOSBs); Electronic imaging platforms for inspecting semiconductor wafer carriers, front opening unified pods (FOUPs), and front opening shipping boxes (FOSBs); Optical inspection apparatus for inspecting semiconductor wafer carriers, front opening unified pods (FOUPs), and front opening shipping boxes (FOSBs), with integrated recorded software for operating the optical inspection apparatus, sold as a unit; Downloadable and recorded software for analyzing data related to semiconductor wafer carriers, front opening unified pods (FOUPs), and front opening shipping boxes (FOSBs); Machines for inspecting wafer carriers, front opening unified pods (FOUPs), and front opening shipping boxes (FOSBs), for use in semiconductor device manufacturing; Machines for inspecting wafer carriers, front opening unified pods (FOUPs), and front opening shipping boxes (FOSBs), with integrated recorded software for operating the machines, sold as a unit

Downloadable and recorded software for optimizing cleaning of wafer carriers and reticle carriers in semiconductor device manufacturing; Downloadable and recorded software for optimizing contamination control in semiconductor device manufacturing; Downloadable and recorded software for controlling machines for contamination control and cleaning of wafer carriers and reticle carriers in semiconductor device manufacturing; Downloadable and recorded software for use in connection with machines for contamination control in semiconductor device manufacturing; Downloadable and recorded software for use in semiconductor device manufacturing; Downloadable and recorded software for analyzing data related to contamination control and cleaning of wafer carriers and reticle carriers in semiconductor device manufacturing; Machines for contamination control in semiconductor device manufacturing with integrated recorded software for optimizing contamination control, sold as a unit; Machines for contamination control in semiconductor device manufacturing with integrated recorded software for controlling the machines, sold as a unit; Machines for cleaning wafer carriers; Machines for semiconductor device manufacturing with integrated recorded operating system software, sold as a unit; Filters and purifiers for machines, namely, filters and purifiers for removing contaminants from gases used in the semiconductor industry; Semiconductor wafer processing machines using sensors to detect impurities, defects and/or contamination in wafer carriers or wafer carrier systems; Machines for cleaning reticle carriers; Semiconductor substrate manufacturing machines; Machines for contamination control in semiconductor device manufacturing; Machines for cleaning of wafer carriers and reticle carriers in semiconductor device manufacturing with integrated recorded software for optimizing cleaning of wafer carriers and reticle carriers, sold as a unit; Semiconductor wafer processing machines; Machines for inspecting reticle carriers; Semiconductor manufacturing machines; Machines for contamination control in semiconductor device manufacturing with integrated recorded software for analyzing data, sold as a unit; Semiconductor reticle processing machines; Machines for manufacturing semiconductors; Machines for semiconductor device manufacturing; Machines for inspecting wafer carriers; Semiconductor reticle processing machines using sensor systems to detect impurities, defects and/or contamination in reticle carriers or systems; Providing on-line non-downloadable software for analyzing data related to contamination control and cleaning of wafer carriers and reticle carriers in semiconductor device manufacturing; Providing on-line non-downloadable software for optimizing cleaning of wafer carriers and reticle carriers in semiconductor device manufacturing; Providing on-line non-downloadable software for optimizing contamination control in semiconductor device manufacturing; Providing on-line non-downloadable software for use in connection with machines for contamination control in semiconductor device manufacturing; Providing on-line non-downloadable software for use in semiconductor device manufacturing; Providing on-line non-downloadable software for controlling machines for contamination control and cleaning of wafer carriers and reticle carriers in semiconductor device manufacturing

Machines for cleaning wafer carriers; Machines for contamination control in semiconductor device manufacturing; Semiconductor wafer processing machines using sensors to detect impurities, defects and/or contamination in wafer carriers or wafer carrier systems; Semiconductor reticle processing machines; Machines for semiconductor device manufacturing; Semiconductor wafer processing machines; Machines for inspecting reticle carriers; Machines for manufacturing semiconductors; Filters and purifiers for machines, namely, filters and purifiers for removing contaminants from gases used in the semiconductor industry; Semiconductor reticle processing machines using sensor systems to detect impurities, defects and/or contamination in reticle carriers or systems; Semiconductor manufacturing machines; Machines for cleaning reticle carriers; Semiconductor substrate manufacturing machines; Machines for inspecting wafer carriers

Machines for manufacturing semiconductors; Semiconductor manufacturing machines; Machines for contamination control in semiconductor device manufacturing; Filters and purifiers for machines, namely, filters and purifiers for removing contaminants from gases used in the semiconductor industry; Semiconductor reticle processing machines; Machines for inspecting reticle carriers; Semiconductor wafer processing machines using sensors to detect impurities, defects and/or contamination in wafer carriers or wafer carrier systems; Semiconductor substrate manufacturing machines; Semiconductor wafer processing machines; Semiconductor reticle processing machines using sensor systems to detect impurities, defects and/or contamination in reticle carriers or systems; Machines for inspecting wafer carriers; Machines for cleaning wafer carriers; Machines for semiconductor device manufacturing; Machines for cleaning reticle carriers

Downloadable and recorded software for use in semiconductor device manufacturing, namely downloadable and recorded software for optical inspection of semiconductor wafer carriers and front-opening unified pods (FOUPs); Downloadable and recorded software for use in connection with machines for contamination control in semiconductor device manufacturing, namely, downloadable and recorded computer software for optical inspection of semiconductor wafer carriers and front-opening unified pods (FOUPs); Downloadable and recorded software for controlling machines for contamination control and cleaning of wafer carriers and reticle carriers in semiconductor device manufacturing; Downloadable and recorded software for analyzing data related to contamination control and cleaning of wafer carriers and reticle carriers in semiconductor device manufacturing; Downloadable and recorded software for optimizing contamination control in semiconductor device manufacturing; Downloadable and recorded software for optimizing cleaning of wafer carriers and reticle carriers in semiconductor device manufacturing; Machines for contamination control in semiconductor device manufacturing with integrated recorded software for analyzing data, sold as a unit; Machines for contamination control in semiconductor device manufacturing with integrated recorded software for controlling the machines, sold as a unit; Machines for cleaning of wafer carriers and reticle carriers in semiconductor device manufacturing with integrated recorded software for optimizing cleaning of wafer carriers and reticle carriers, sold as a unit; Machines for contamination control in semiconductor device manufacturing with integrated recorded software for optimizing contamination control, sold as a unit; Machines for semiconductor device manufacturing with integrated recorded operating system software, sold as a unit; Machines for cleaning of wafer carriers and reticle carriers in semiconductor device manufacturing with integrated recorded software for optical inspection for optimizing cleaning of wafer carriers and reticle carriers, sold as a unit; Machines for contamination control in semiconductor device manufacturing with integrated recorded software for optical inspection for optimizing contamination control, sold as a unit

Reticle stockers

Machines for contamination control in semiconductor device manufacturing; machines for cleaning wafer carriers; machines for cleaning reticle carriers; machines for inspecting wafer carriers; machines for inspecting reticle carriers; semiconductor wafer processing equipment, namely, machines using cameras and illumination systems to detect defects and/or contamination in wafer carriers; semiconductor reticle processing equipment, namely, machines using cameras and illumination systems to detect defects and/or contamination in reticle carriers; machines for semiconductor device manufacturing

Training in the use and operation of manufacturing equipment, namely, for manufacturing semiconductors and other electronic devices [ ; training others in connection with the maintenance and repair of high-vacuum pumps ]; [ Custom manufacture of automated systems for laboratory storage, dosage and replication to the specification of others ]; Semiconductor manufacturing machines; semiconductor wafer handling systems in the nature of industrial robots and operating software sold as an integral component thereof; [ cryogenically cooled vacuum pumps, often referred to as cryopumps; compressors for cryogenic refrigerators; cryopump systems comprised of one or more cryopump, one or more compressor, and one or more system controller; ] machines, namely, load port modules in the nature of substrate transport machines for use in manufacturing automation, load lock modules in the nature of substrate transport machines for use in manufacturing automation, substrate aligners in the nature of substrate alignment machines for use in manufacturing automation, atmospheric substrate handling machines in the nature of substrate transport machines for use in manufacturing automation, vacuum substrate handling machines in the nature of substrate transport machines for use in manufacturing automation; industrial robots, sorting machines, and transport machines for transporting or sorting substrate and substrate manufacturing tools in the field of manufacturing automation; motors, other than for land vehicles, for use in connection with manufacturing automation; machine coupling and belting, except for land vehicles, for use in connection with manufacturing automation; industrial robots used for transport in the process of manufacturing integrated circuits and other electronic devices; tool platforms in the nature of substrate transport systems comprised primarily of industrial robots and transport chambers and used in the manufacture of integrated circuits, semiconductor, LED and OLED devices; [ high vacuum pumping systems, combining molecular and cryogenic pumping capabilities, comprised of turbo-pumps, connectors, valves, controller cables, control modules, key pads and displays units; ] semiconductor wafer processing machines, namely, load port modules, load lock modules, wafer aligners, and wafer handling robots for use in the field of manufacturing automation; automated storage and retrieval machines for use in manufacturing automation, for use in banking of tools and components used in the manufacture of integrated circuits and other electronic devices, and for use in banking of biological and chemical specimens; integrated material handling machines, namely, industrial robots for use in banking and transport of tools and components used in the manufacture of integrated circuits and other electronic devices and for use in banking and transport of biological and chemical specimens; conveyors and sorting machines for use in manufacturing automation, for use in handling tools and components used in the manufacture of integrated circuits and other electronic devices, and for use in handling of biological and chemical specimens; [ laboratory dosage and replication machines for pharmaceutical and chemical compounds and biological specimens, and structural parts therefor; ] machines for sealing, piercing, and capping of test tubes, vials and plates for laboratory use, and structural parts therefor; Repair and maintenance services for fab manufacturing equipment, namely, for semiconductor manufacturing equipment [ ; maintenance and repair of high-vacuum pumps, and consulting services in connection therewith ]; [ Refrigeration units comprising a closed-cycle system consisting of cryorefrigerators, pulse tubes, mixed refrigerant heat exchangers and expanders, compressors, cryostats, and gas transfer lines for cryogenic use; portable mechanical refrigeration chillers capable of supplying liquid coolant, and refrigeration gas chillers, all for use in cryogenic refrigeration at temperatures less than 160K; refrigeration units in the nature of closed-cycle refrigeration systems comprised of cryostats with cold ends, compressors and gas transfer lines, for cryogenic use; refrigerator systems and parts therefor, primarily comprising compressors, gas expanders, monitors; cryogenic refrigerators, and parts therefor; refrigeration systems for industrial use, namely, refrigerators; refrigeration units comprising a closed-cycle system, namely, cryostats, compressors, and gas transfer lines, for cryogenic use; portable mechanical refrigeration chillers capable of supplying liquid coolant ]; [ Medical devices, namely, refrigeration and heating apparatus, for storing medical materials at a variety of temperatures ranging from -200 to 200 degrees C; ] [ medical equipment, namely, automated biochemical assay systems comprising microplate readers, robotics fluid dispensers and reagent stores; automated microplate readers comprising fluorescent detectors; fluid dispensing devices; ] [ automated compound stores comprising addressable storage compartments ] [, fluid dispensing devices ] [ and robotics; ] [ and ] automated microplate handling machines, namely, plate stackers, robotics, conveyors and stages, namely, motorized positioning platforms used to position microplates and related laboratory equipment; [ Computer diagnostic services for manufacturing processes involving the interpretation and analysis of computer stored or computer relayed data taken from electronic systems involved in controlling and monitoring such processes; computer diagnostic services in the field of manufacturing processes, namely, developing recommendations for the optimization of manufacturing processes based on the data gleaned from systems; ] Technical support services, namely, troubleshooting of manufacturing equipment problems in semiconductor and other electronic device manufacture; consultation in the field of manufacturing equipment, namely, operational data analysis services for semiconductor and other electronic device manufacture [ ; computer services, namely, providing temporary use of online non-downloadable software for laboratory administration, processing and handling of laboratory compounds and specimens and operating and managing laboratory storage, dosage and replication machines ] [ ; electronic monitoring services for oversight and reporting of technical problems in the field of manufacturing equipment, namely, for manufacturing semiconductors and other electronic devices ]

Computer software for operating semiconductor wafer handling systems, semiconductor manufacturing machines, robotic systems and process control systems; controllers, namely, computer hardware and operating software sold as a unit for controlling operation of robotic and process control systems; manipulators for the remote operation of robotic arms for use in the field of manufacturing automation transfer robots used in atmospheric process tools and integrated wafer handling systems, namely, automated wafer handling platforms for open, ambient air in-line wafer handling platforms; integrated circuits and semiconductor equipments, namely, cluster-tool integration platforms, single-arm and multi-arm automated transfer apparatus and computer software and accompanying user manuals all sold as a unit used in the manufacture of flat panel displays, integrated circuits and semiconductor devices; goods for robotic automation and control, namely, computer hardware and software integrated therewith, for the tracking, transport, storage and processing of medical and biological samples in the healthcare and medical research industries; goods for robotic automation and control, namely, computer hardware and software integrated therewith, for tracking, transport, storage and processing of medical and biological samples in the healthcare and medical research industries for use in drug discovery, bioprocess development, biologics production and regenerative medicine; goods for robotic automation and control, namely, computer hardware and software integrated therewith, for moving medical and biological substances whether in a liquid or solid state; goods for robotic automation and control, namely, computer hardware and software integrated therewith, for transporting medical and biological materials from one container to another container or for transporting individual containers from one location to another location; goods for robotic automation and control, namely, computer hardware and software integrated therewith, for storing, indexing and future retrieval of medical and biological compounds; [ cell culture apparatus for laboratory use and for manufacturing use, namely, cell culture dishes and tissue culture flasks; ] automated laboratory and manufacturing equipment for tissue engineering; goods for robotic automation and control, namely, computer hardware and software integrated therewith, for use in high throughput drug discovery; software for tracking and control of biological and medical materials; [ biological material storage devices for laboratory use for storing the materials at a variety of temperatures ranging from -200 to 200c; ] storage vault for containing semiconductor reticles; controller, namely, computer hardware and operating software sold as a unit for controlling operation of robotic and process control systems; computer software for monitoring and controlling equipment for use in the fields of robotic and process control systems; automated reticle inspection system comprised of a laboratory robot and self-contained workcell providing non-contaminating hands-off reticle inspection; computer hardware, namely, communication units for use in monitoring, communicating, and analyzing data taken from electronic systems involved in controlling and monitoring manufacturing processes; automated reticle inspection system comprised of a laboratory robot, selfcontained workcell and computer software sold as a unit for the operation thereof, providing non-contaminated hands-off reticle inspection; apparatus for recording transmission or reproduction of sound or images; [ scientific apparatus in the nature of laboratory systems for high volume storage and retrieval of chemical compounds and biological samples, namely, refrigerated enclosures and sample holders, imaging devices for viewing samples and sample holders, and robotic systems for moving sample holders within the refrigerated enclosure, for loading sample holders into and removing sample holders from the refrigerated enclosure; computer controllers, user interfaces and computer software for interfacing with, monitoring and controlling the refrigerated enclosure, imaging devices and robotic systems, and parts therefor; ] [ laboratory apparatus, namely, laboratory sample translocators, laboratory sample storing containers, fluid transfer and dispensing devices, and test tubes and wells for use in identifying chemicals for use as pharmaceuticals, agricultural compounds and cosmetics; ] laboratory instrumentation for use in the application of caps to and removal of caps from an array of sample tubes; [ laboratory instrumentation for use in the removal of seals from multi-well plates and arrays of containers, vials or tubes; ] laboratory instrumentation for use in the application of seals to multi-well plates and arrays of containers, vials or tubes; [ laboratory equipment, namely, automated biochemical assay systems comprising microplate readers, robotics fluid dispensers and reagent stores; fluid dispensing devices; automated compound stores comprising addressable storage compartments, fluid dispensing devices and robotics; incubators; and automated microplate handling machines, namely, plate stackers, robotics, conveyors and stages, namely, motorized positioning platforms used to position microplates and related laboratory equipment; ] [ laboratory equipment made of rubber and plastic material, namely, test tube caps, cap mats, piercing lids, test tube racks, and storage and delivery plates for use in connection with laboratory storage, dosage and replication; laboratory supplies, namely, adhesive tape for use in automated laboratory systems for removal of seals from microplates and sample containers, for laboratory use; ] [ temperature-controlled enclosures and specimen holders for growing biological molecules and crystals; ] environmentally controlled enclosures for storing chemical and biological specimens in sample containers; [ imaging devices for viewing specimens within temperature-controlled and environmentally-controlled enclosures; robotic handlers for manipulating specimens and imaging devices within temperature-controlled and environmentally-controlled enclosures; ] sample container cappers and decappers for applying caps to and removing caps from arrays of sample containers; computer controllers, user interfaces and computer software for interfacing with and controlling sorters, washers, chemical and biological synthesizers, compound cleavers and evaporators, detectors, temperature-controlled and environmentally-controlled enclosures, imaging devices and robotic handlers, network servers, local and remote databases, local and remote data processors, for communicating with local and remote user interfaces, and for analyzing data generated therefrom [ ; scientific and laboratory equipment, namely, microplates for biological and genetic specimens ]