MKS INC.

Maintenance and repair of products for use in semiconductor manufacturing processes | Product design and development in the field of semiconductor manufacturing processes, namely, design and development of components, subsystems and systems for generation, analysis, control, measurement and delivery of gases used under vacuum; design and testing for new product development of lasers, optics and opto-mechanic products for system level integration for laser beam creation, attenuation and delivery, laser beam profiling and measurement, specimen positioning and stabilization; product research and development in the field of power and reactive gas generation, vacuum measurement and control, gas creation and delivery, laser and photonics creation, delivery and measurement; calibration of products for use in semiconductor manufacturing processes

Fiber optic temperature sensors; optical amplifiers; temperature sensors; fiber optic temperature sensors using fiber bragg gratings; fiber optic position sensors; Semiconductor wafer processing equipment; Engineering and design of measurement technology in the field of semiconductor industries; research in the area of semiconductor processing technology; technical consultancy in relation to the engineering methods and use of devices in the field of semiconductor processing technology

Industrial programmable computer hardware; plasma generators for supplying activated gases; dissolved gas generation and delivery systems comprised of apparatus for supplying gases dissolved in fluids used in manufacturing processes; electronic control equipment, namely, microprocessor based data communication devices and data analytics devices for automation control and process monitoring applications

Installation, set-up, maintenance and repair services of equipment used in the production of printed circuit boards and advanced electronics packaging interconnects | Calibration services in the fields of printed circuit boards and advanced electronics packaging interconnects; troubleshooting services in the nature of diagnosing problems with equipment used in the production of printed circuit boards and advanced electronics packaging interconnects

Radio Frequency (RF) generators

Radio Frequency (RF) matching networks

Plasma generator for etching byproduct from vacuum piping, components, and systems

Maintenance, repair and calibration of products for use in semiconductor manufacturing processes; "CHAMBER"; Product design and development in the field of semiconductor manufacturing processes, namely, design and development of components, subsystems and systems for generation, analysis, control, measurement and delivery of gases used under vacuum; Design and testing for new product development, namely, lasers, optics and opto-mechanic products for system level integration for beam creation, attenuation and delivery, beam profiling and measurement, specimen positioning and stabilization; product research and development in the field of power and reactive gas generation, vacuum measurement and control, gas creation and delivery, laser and photonics creation, delivery and measurement

Product design and development, laser and photonics system level integration, research and development, and consulting services in the field of selection of computer system, subsystem and components; maintenance, repair and calibration of computer software for use in the field of laser-based guidance and control for manufacturing processes

Electrochemical gas generators, namely, reactive gas generators; electrochemical gas generators featuring remote plasma sources [ and ozone generators] ; and electrochemical gas generators for use in monitoring and controlling gas and plasma generation, flow, detection, analysis, and delivery

electronic sensors; scientific apparatus, namely, spectrometers; optical sensors; chemical detection sensors; hydrocarbon analyzer; sensors for the detection and analysis of chemical compounds in gases, solids, and liquids; scientific and laboratory instruments, namely, analytical instruments for determining chemical constituents; scientific instruments and apparatus for use in testing, control, detection, monitoring, and analysis of chemical compounds and complex chemistries in scientific and industrial operations; optical sensor platform comprised of sensors and software for detection and analysis of chemical compounds; scientific instruments and apparatus for use in process monitoring of hydrocarbon products, namely oils, gases, and petrochemicals; sensors for use in combustion, environmental and continuous emissions monitoring

Vacuum quality monitors in the nature of electronic vacuum gauge controllers for use in the measurement of vacuums; scientific apparatus, namely, mass spectrometer and parts and fittings therefor, and optical spectrometers and parts and fittings therefor; other spectrometer-based instruments and subassemblies in the nature of scientific research equipment for use in mass spectrometers; Computer hardware for atmospheric sampling, plasma monitoring and control, particle measuring for gas compositional analysis, all for use in communication units for monitoring, communicating and analyzing data taken from electronic systems involved in controlling and monitoring manufacturing processes and integrating controls and gauges

Class 009: Sensors, electrical instrumentation, gauges, switches and meters for measurement and control of fluid pressure, vacuum and gas flow; residual gas analyzers; monitors for detecting gas compositions within a process chamber; mass spectrometers; electrical analog-digital interface adapters; computer hardware used for measurement and control of fluid pressure, vacuum and gas flow; radio frequency, direct current and microwave power supplies and generators; power generators for converting energy from chemical gas reactions; gas and fluid pressure valves, flanges and fittings for controlling, containing, isolating and shutting off gas and fluid flow; gas sticks composed of mass flow controllers, pressure transducers, control valves, isolation valves and volumes; electronic gas filters and purifiers; heaters; helium leak detectors; gas detectors and analyzers; calibration equipment for monitoring and adjusting gas and fluid pressure and flow; traps for capturing waste materials exiting from a process chamber; liquid delivery system composed primarily of a pump, vaporizer, and controller for vaporizing a liquid into a gas and delivering the gas to a process chamber; software for operating mass spectrometers; computer hardware and software for determining the presence and measurement of residual contaminants; micro-processor based data communication devices for communicating between quadrapole gas or fluid mass analyzers for and a computer; devices used to generate radio waves and microwave plasma; reactive gas generators including remote plasma sources and ozone generators; controllers, computer hardware and software for use in monitoring and controlling fluid, vacuum and gas generation, flow, detection, analysis, and delivery devices; radio frequency amplifiers and radio frequency power generators; DC power generators; and user manuals and guides sold as a unit therewith

Gas analyzer for detecting chemical agents

Installation and repair of power and reactive gas devices, vacuum technology devices, flow measurement and control devices, pressure management and control devices, gas analysis devices, leak detection devices, flow and pressure calibration devices, medical electronics, biopharmaceutical devices and computer hardware for use in monitoring and controlling fluid, vacuum and gas generation, flow, detection, analysis, and delivery devices | Arranging and conducting classes and workshops in the use and maintenance of power and reactive gas devices, vacuum technology devices, flow measurement and control devices, pressure management and control devices, gas analysis devices, leak detection devices, flow and pressure calibration devices, medical electronics, biopharmaceutical devices and computer hardware and software for use in monitoring and controlling fluid, vacuum and gas generation, flow, detection, analysis, and delivery devices | Technical consultation in the fields of power and reactive gas, vacuum technology, flow measurement and control, pressure management and control, gas analysis, leak detection, calibration of flow and pressure management devices, medical electronics, biopharmaceuticals and computer hardware and software for use in monitoring and controlling fluid, vacuum and gas Generation, flow, detection, analysis, and delivery devices; technical support services, namely, troubleshooting of problems related to power and reactive gas devices, vacuum technology devices, flow measurement and control devices, pressure management and control devices, gas analysis devices, leak detection devices, calibration devices, medical electronics, biopharmaceutical devices and computer hardware and software for use in monitoring and controlling fluid, vacuum and gas generation, flow, detection, analysis, and delivery devices; installation, updating, and maintenance of computer software for use in monitoring and controlling fluid, vacuum and gas generation, flow, detection, analysis, and delivery devices

PLASMA GENERATORS FOR USE IN THE SEMICONDUCTOR [ AND BIOPHARMACEUTICAL ] INDUSTRIES

Ozone gas generator and delivery systems comprised primarily of a pump, vaporizer, and power controller, used in the semiconductor and thin film coating markets for photoresist and contaminant removal, cleaning, oxide growth, and surface conditioning

Radio Frequency (RF) Generators

"INTEGRITY SUITE"

Computer software for configuring, modifying, archiving, tracking and retrieving computer programs, files and documents; "FEDERATED SERVER"

Class 011: Ozone Generator For Manufacture Of Ultra Pure, High Concentration Ozone Through Passing Oxygen Through A Silent Electrical Discharge

Computer hardware and computer software used in the semiconductor industry for automating wafer processing

Vacuum Gauges, namely Gauge Tubes and Vacuum Gauge Controllers used in the measurement of Vacuums

computer software for monitoring, alerting and job scheduling of networks, networks applications, and Internet/Intranet-based systems

COMPUTER SOFTWARE FOR ASSISTING IN THE CONFIGURATION, MODIFICATION, ARCHIVING AND RETRIEVAL OF COMPUTER PROGRAMS, FILES AND DOCUMENTS AND FOR PROVIDING ADDITIONAL UTILITIES FROM A SPECIFIC COMPUTER OPERATING ENVIRONMENT; "SOFTWARE"; CONSULTING, CUSTOMIZATION, CONFIGURATION, INTEGRATION, INSTALLATION, MAINTENANCE SERVICES AND TECHNICAL SUPPORT SERVICES, NAMELY TROUBLESHOOTING OF COMPUTER SOFTWARE PROBLEMS, ALL IN CONNECTION WITH COMPUTER SOFTWARE FOR ASSISTING IN THE CONFIGURATION, MODIFICATION, ARCHIVING AND RETRIEVAL OF COMPUTER PROGRAMS, FILES AND DOCUMENTS AND FOR PROVIDING ADDITIONAL UTILITIES FROM A SPECIFIC COMPUTER OPERATING ENVIRONMENT

CAPACITANCE MANOMETERS FOR MEASURING FOR VACUUM PRESSURE

COMPUTER SOFTWARE, NAMELY A SOURCE CODE BROWSER

COMPUTER SOFTWARE WHICH ASSISTS SOFTWARE DEVELOPERS IN ASSESSING IN ADVANCE THE IMPACT OF A CHANGE TO THE SOURCE CODE OF CERTAIN SOFTWARE ON THE FUNCTION OF THAT SOFTWARE AND PROJECTS RELATED THERETO; "IMPACT"

COMPUTER SOFTWARE, NAMELY, CHANGE MANAGEMENT SOFTWARE WHICH IS USED TO FACILITATE PROCESS CONTROL AND ENTERPRISE COLLABORATION OF SOFTWARE; "MANAGER"

COMPUTER SOFTWARE, NAMELY SOFTWARE FOR CROSS-PLATFORM, WORKFLOW-ENABLED SOFTWARE CONFIGURATION MANAGEMENT

Sensors and electrical instrumentation and power supplies and signal conditioners and analog and digital meters for measurement and control of fluid pressure, vacuum and flow; Residual gas analyzers; Process and optical monitors for detecting gas compositions within a process chamber; Quadrapole mass spectrometers; Electrical analog-digital interface adapters, gateway and card modules; Radio frequency, direct current and microwave power supplies and generators; Power generators for converting energy from chemical gas reactions to power for running processes with a process chamber; Thermal, electrical and pressure-based mass flow controllers; Gas pressure valves for controlling and shutting off gas flow; Vacuum and gas component heaters; Gas sticks composed of mass flow controllers, pressure transducers, control valves, isolation valves and volumes; [Gas filters and purifiers;] Heaters; Helium leak detectors; Gas detector and analyzer for monitoring gas emissions for safety and compliance; Calibration equipment for pressure and flow transducers, and for flow meters; Vacuum gauge systems, vacuum gauges, transducers, metal pipe and hose fittings, pressure valves, heater jackets and traps for capturing waste materials exiting from a process chamber; Liquid delivery system composed primarily of a pump, vaporizer, and power controller for vaporizing a liquid into a gas and delivering the gas to a process chamber; In situ flow verifier of process or purge gases; Vacuum sensing and switching equipment, namely, vacuum sensor switches; [Hardware and software for measuring the transmissivity, reflectivity, optical density and thickness of thin metal films, and for providing topographical images of the same;] Software for operating optical spectrometers; Software for operating quadrapole mass spectrometers; Software for determining the presence and measurement of residual contaminants in a semiconductor process; Electronic control accessories, namely, micro-processor based data communication devices for communicating between quadrapole mass analyzers and a computer

integrated diagnostic instrument composed of a chamber for providing a small gas volume, a pressure sensor, shut off values and control electronics for providing in situ verification of mass flow controller performance on semiconductor process tools

[ manually operated metal vacuum valves ] | Vacuum Gauges, Vacuum Gauge Tubes, Vacuum Gauge Controllers, Ionization Gauge Tubes, Ionization Gauge Controllers, and Automatic Vacuum Valves for pressure-flow control

Radio frequency generators for use in thin film processes

High power electric power supply for thin film processes

ozone generators

microwave equipment, namely, apparatuses that match the impedance of a load with the impedance of a source

electrical power supplies, namely, microwave apparatus that matches load impedance and source impedance

RADIO FREQUENCY PLASMA IMPEDANCE ANALYZERS AND RELATED CONTROL EQUIPMENT, NAMELY SENSOR HEADS, CABLES, TRANSFORMERS USED IN CONJUNCTION WITH SOFTWARE; "VI" and "PROBE"

APPARATUS COMPONENTS FOR MATERIALS PROCESSING, NAMELY GAUGE SYSTEMS, GAUGES, TRANSDUCERS, AUTOMATIC VALVES; APPARATUS COMPONENTS FOR MATERIALS PROCESSING, NAMELY METAL FLANGES, METAL FITTINGS FOR GAS LINES; APPARATUS COMPONENTS FOR MATERIALS PROCESSING, NAMELY, HEATED LINES AND TRAPS

computer software for database integration and manipulation

computer software for database integration and manipulation

RESIDUAL GAS ANALYZERS

vacuum gauges, namely, gauge tubes and vacuum gauge controllers used in the measurement of vacuums

plasma generators for etching, sputtering, chemical vapor deposition, ion implantation, ion milling, and sterilization

sensors and electrical instrumentation and power supplies and signal conditioners and analog and digital meters for measurement and control of fluid pressure, vacuum and flow; "INSTRUMENTS"

computer programs for assisting in the configuration, modification, archiving and retrieval of other computer programs, files and documents

cold cathode high vacuum gauge

vacuum gauges, namely gauge tubes and vacuum gauge controllers used in the measurement of vacuums

computer software for configuring, modifying, archiving, tracking and retrieving computer programs, files and documents

ionization gauges; namely, gauge tubes and vacuum gauge controllers used in the measurement of high vacuums

computer operating systems software and printed instruction manuals therefor, sold as a unit; computer programs in the field of programming tools and utilities useful by professional computer programmers and others to implement, interrelate, administer, develop, modify and publish computer programs and files, and printed instruction manuals therefor sold as a unit; computer software design, development, systems analysis and computer networking consulting services in the field of professional computer operating software and programming tools and utilities

Class 009: AUTOMATICALLY OPERATED SECURITY VALVES FOR INDUSTRIAL VACUUM SYSTEMS

Class 009: MICROWAVE PLASMA GENERATOR UNITS AND COMPONENT PARTS THEREFOR FOR USE IN INDUSTRIAL AND SCIENTIFIC APPLICATIONS

SENSORS AND ELECTRICAL INSTRUMENTATION AND POWER SUPPLIES AND SIGNAL CONDITIONERS AND ANALOG AND DIGITAL METERS FOR MEASUREMENT AND CONTROL OF FLUID PRESSURE, VACUUM AND FLOW; "INSTRUMENTS, INC."

Capacitance Manometers for Measuring for Vacuum Pressure

computer systems software for micro computers which adapts computer software to operate on otherwise non-compatible computer systems

computer programs for automating, controlling and monitoring changes for source code and objects; [ computer instruction manuals for use in the field of automating, controlling and monitoring changes to source code and objects ]

computer operating systems software and printed instruction manuals therefor, sold as a unit; computer programs in the field of programming tools and utilities useful for professional computer programmers and others to implement, interrelate, administer, develop, modify and publish computer programs and files, and printed instruction manuals therefor sold as a unit; "TOOLKIT"