GleanMark

ATLAS Trademark

ATLAS is a USPTO trademark filed by ONTO INNOVATION INC.. Status: Registered.

Trademark Facts

MarkATLAS
Serial Number76551346
Registration Number2909975
StatusRegistered
Filing Date2003-10-14
Registration Date2004-12-14
Mark TypeWord
Nice Classes009 (Electronics & Software)
OwnerONTO INNOVATION INC.
Attorney of RecordKen M. Sheets
Prosecution Events47
Latest EventNA89 on 2025-07-22

Goods & Services

Metrology equipment that employs polarized, normal incidence spectroscopic ellipsometry for linewidth profile and critical dimensions, spectroscopic reflectometry for films and film stacks, ultraviolet (UV) and deep UV spectroscopic ellipsometry for ultra-thin films and film characterization, diffraction-based overlay and film stress/bow measurement

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